![]() ![]() Laser assisted – Chemical Micromachining for Semicon & Biomedical applications.Ģ6 6 Axis Hexapod Travel in XYZ + Pitch/Roll/Theta Low voltage Supported by ASIC based driver Low price in volume Performance Characteristics Max velocity: 150mm/sec Max force: 30g (.3N) Highest resolution: 1um Requires straight slide (to 10um)īio-Medical/Pharmaceutical Instrumentation Microscopy Hand-held devices and tools (pumps, endoscopes) Military/Security Aperture/Shutter Control Auto Focus Pan & Tilt Semiconductor SEM & ION beam Wafer Metrology Storage media Metrology and Assembly Automation Consumer Products (cell phone, digital camera)Ĥ Axis (X/Y/Z/T) Vacuum Rated Low Magnetic Field (VN motors, SS Bearings) Spring Counterbalance in Z Resolution of 100nm (available to 10nm)ĢAxis (X/Y) X-Ray Inspection (radiation environment) Demonstrated ability to use vibration cancellation with AB2/DC Mode. ![]() The “EDGE” ‘High volume’ industrial motor. ![]() Unlimited travel with small operating package (Drive strips to 4m length) Superior move & settle & Slow speed CV Vacuum motors for high and UHV Up to Torr Non-Magnetic motors / No EMI from motor No servo dither & no hysteresis Built in holding / braking without power consumption Wide range of dynamic performance (Resolution to 1nm, velocity from 1u/sec to 300mm/sec) Cost effective direct drive solutionġ9 Edge Motor & ASIC for Optical Image Stabilization Linear Stage PZT Rotary Table PZT Linear Motion Rotary Motionġ4 Same Motor for Linear or Rotary Motionġ7 Motor Features Standard motors for most operating environments Slow speed – ellipse at the few nm level High speed- ellipse at the tens of microns The larger the ellipse, the more the mechanical stress, the more the heat, the less the duty cycle >75,000 motors in field >10,000 linear axes in the field >Shipping 700k motors in 2008, for cell phone auto focusĥ Nanomotion Theory of Operation Traditional Piezo VS Reversed Piezo VSĨ Basic Structure of Nanomotion’s Piezoelectric Elementĩ Nanomotion Motor Basics Ultrasonic Standing Wavesīending Mode Longitudinal Mode Simultaneous excitation of both modes Creates motion at the tip of the motor finger PZT Element Slide + =ġ0 Finite Element Simulation Longitudinal Mode Bending Modeġ2 Motor Ellipse Amplitude of ellipse varies with voltage Nanomotion Established in 1992 for the design, manufacture and marketing of piezo-ceramic motors and electronics (for linear and rotary motion) Subsidiary of Johnson Electric ($2.5B, 38,000 employees, 3 million motors/day) Saia Burges (step motors, switches, solenoids) Nihon Mini Motor (step & dc motors for camera & dvd) Parlex (flex circuits and contract mfg) Nanomotion is 65 people with ~35% in the engineering and R&D. 3 Agenda Corporate Overview Theory of Operation Product Features ![]()
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